High speed electrical interconnect and method of manufacture

ABSTRACT

Fundamental interconnect systems for connecting high-speed electronics elements are provided. The interconnect systems consists of signal line, dielectric system with open trench or slot filled up with air or lower dielectric loss material, and the ground plane. The signal line could be for example, microstripline, strip line, coplanar line, single line or differential pairs. The interconnect system can be used for on-chip interconnects or can also be used for off-chip interconnects. The fundamental techniques provided in this invention can also be used for high-speed connectors and high-speed cables.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a divisional application of Ser. No. 10/793,362filed Mar. 4, 2004.

FIELD OF THE INVENTION

This invention relates to interconnection of electronic elements on-chip(hereinafter also referred as intra-chip), and off-chip (hereinafteralso referred as inter-chip) interconnection, high-speed connectors, andcable fabrication. More particularly, this invention is related to (a)connecting two or more electronic devices within a chip (on-chip orintra-chip connection), (b) connecting on a circuit board, a high speedsignal line of singles or multi processor chips to a signal line ofsingles or multi memory chips (off-chip or inter-chip) which are used incomputers ranging from personal computers to super-computers, and gamesystems, (c) interface means (e.g., a connector or a cable) to connecttwo or more high speed electronic elements, and (d) high-speed chippackaging to connect the chip (die) to the package. This invention isalso related to high-speed electrical interconnection, opticalinterconnection, or both electrical and optical interconnection wheretwo or more high-speed electrical and/or optical elements are to beconnected.

BACKGROUND OF THE INVENTION

The level of integration within integrated circuits (ICs) has led tolarger numbers of IC interconnections as well as higher data rates.Today, typical signal speed of ICs is approximately 3 GHz, and shortlyit will reach 10 GHz and higher. The number of interconnections requiredin a single IC (e.g., a single processor) may be close to 2000, andshortly that number will increase to over 5000. Simultaneously achievinghigher data rates and higher numbers of on-chip, and off-chipinterconnection densities (number of interconnections per unit area) isbecoming increasingly difficult as IC technologies continue to evolve.For example, in on-chip cases, as the number of electronic devices suchas transistors, are increased, interconnecting the electronic deviceswithout sacrificing the signal speed is more and more challenging.Similarly, in off-chip cases, high density of interconnections,including die-level and chip-to-chip packaging (hereafter “chip”indicates the die with package) on the printed circuit board (PCB), willalso be increasingly difficult.

Therefore, increasing the signal speed and number of interconnectionswithin, and outside the ICs by using a low-cost, high-levelinterconnection technique compatible with existing manufacturingprocesses, is highly desirable.

It is generally known in the art that at signal speeds below a fewMegahertz (MHz), electronic devices (both on-chip and off-chip) areinterconnected using a metal conductor for example, a metal wire, forelectrical signals to flow. However for speeds higher than a few MHz,both on-chip and off-chip signals must propagate through impedancematched transmission lines. Any discontinuities in the electrical signalline or via holes (conducting pathways between two or moresubstrates/layers) due to impedance mismatch causes reflection therebydegrading the signal waveform propagating through the electronicdevices. At multi GHz frequencies, the transmission line loss which isthe sum of the conductor loss and the dielectric loss are dependent onthe transmission frequency. Significant attenuation and rise-timedegradation can be caused by losses in the transmission line.Furthermore, interconnection lengths become a significant fraction ofthe wavelength of the high frequency harmonics. Therefore,interconnections must be designed with proper concern for impedance,cross talk, and attenuation. Impedance mismatch must be minimized toreduce the reflections and prevent ringing, which can cause a falsedecision (switching) in the receiver.

At present, technology development is pushing towards a reduction in thesize of the electronic device, resulting in utilization of a largernumber of devices inside a single chip. As the level of integration offuture ‘system-on-a-chip’ design is increasing, chip areas are alsoincreasing. There is high demand for a novel interconnection techniquethat is compatible with standard IC fabrication technology, whilepreserving the signal speed, and assuring adequate isolation forhigh-speed data communication. As the on-chip signal speed increases,the off-chip signal speed also increases, thereby requiring newtechniques for off-chip interconnections that are compatible with thecurrent PCB technology.

FIG. 1 and FIG. 2 are schematics that show parts of conventional on-chipand off-chip interconnections. In particular, an on-chip interconnectionshown in FIG. 1, comprises a single substrate 100 including anelectronic device 102 connected by metal conductors 104. The metalconductors are typically made of materials including aluminum (Al),copper (Cu), tungsten (W), and tungsten silicide (WSi). One or moredielectric layers 106 comprising for example silicon oxide (for a Sidevices), isolate the device from other metal conductors and from otherdevices (not shown here).

A schematic of an off-chip interconnection is shown in FIG. 2, wherein achip 120 (for example, a CPU processor) is connected to another chip 130on a PCB 108, by multilayered electrical signal lines 110. FIG. 3 andFIG. 4 respectively, show a schematic representation of a conventionalBGA (ball grid array) and a CSP (chip-scaled package) packaging for ahigh-speed single chip package (for example, a processor). In both typesof packaging, a die 122 (FIG. 3) or a die 132 (FIG. 4) are attached to aceramic or a polymer substrate 134 (FIG. 4), respectively, containingthe matrix of pins 126 (FIG. 3) and 136 (FIG. 4). Outside pins 128 (FIG.3) and 138 (FIG. 4), located at the bottom-side of the chip package (notshown in both packaging cases), connect with the PCB 108. Heat sinks areattached to the top side of the dies to dissipate heat from the dies.The signal fidelity occurs due to the conventional inter-chip electricalsignal connections 110 and ground/power 112 connections through themultilayered PCB 108. It is highly desirable to have board-levelelectrical interconnections for high-speed inter-chip connection, whichare compatible with existing IC packages such as BGA, CSP, etc., as wellas conventional PCB technologies.

Interconnection technology for both on-chip (intra-chip) and off-chip(inter-chip) interconnections is mainly based on a microstrip line typeor a strip-line type transmission line layout laid on a dielectricmaterial. FIG. 5A shows a cross-sectional view of a microstrip line typetransmission line layout having a trace routed for example at a top or abottom layer of a PCB, in an off-chip interconnection. An electricalconductor 140A to be referred as a “signal” line hereinafter, with awidth W and a thickness T is laid on a dielectric material 142A havingheight H. A ground and/or a power line 144A is located on the bottomside of the PCB, opposite from the signal line 140A. FIG. 5B is thecross-sectional view of a strip-line type transmission line layout,which has a trace 140B routed on the inside of the PCB layer 142B andhas two voltage-reference planes (i.e. power and/or ground) 144B and144B′. The impedances of the microstrip line type and the strip-linetype_transmission lines are expressed by the following equations,respectively:

Z _(microstrip)=[(87/Sqrt.(∈_(r)+1.41)]ln [(5.98×H)/(0.8W+T)]Ω  (1)

Z _(strip)=[(60/Sqrt.(∈_(r))]] ln [(4H)/(0.67π(0.8W+T))]]]Ω  (2)

Equations (1) and (2) indicate that the impedance is directlyproportional to the dielectric constant ∈_(r), and the trace height H,and is inversely proportional to the trace width W and the tracethickness T. In a strip-line layout, the signal line is confined withinthe dielectric layer, whereas in a microstrip line layout the signalline is open to air. In a microstrip line type trace, the_electricalfield is in the dielectric layer as well as in the air, whereas in astrip-line type trace, the field is confined inside the dielectriclayer. Hence, the effective dielectric constant in the strip-line layoutis higher as compared to in the microstrip line layout. There is alsoless dielectric loss (also referred as dielectric loss tangent) in themicrostrip line layouts as compared to the strip-line layout. The highereffective dielectric loss in the strip-line layout results in higherdispersion or signal loss as compared to the microstrip line layout.FIG. 6 in a top view and a cross-sectional view of a microstrip linetype transmission line layout shows the electrical field distribution.The electrical field 146A spreads to both sides of the signal line 140A.FIG. 7A and FIG. 7B show frequency responses of microstrip line andstrip-line layouts. For the same dielectric material, the effectivedielectric constant of the strip-line layout is higher than that of themicrostrip line layout. The signal is attenuated more in the strip-linelayout at higher frequencies. Therefore, to increase the bandwidth ofthe interconnection, the effective dielectric loss should be kept low.

A high-speed signal while propagating through the transmission line,experiences a propagation delay which is dependent on the dielectricconstant of the material. The propagation delay t_(PD) for strip lineand microstrip line type transmission lines are expressed by thefollowing equations, respectively:

t _(PD microstrip)=85[Sqrt.(0.475∈_(r)+0.67)]  (3)

t _(PD stripline)=85[Sqrt.(∈_(r))]  (4)

Equations (3) and (4) indicate that as ∈_(r) increases, the propagationdelay also increases. A microstrip line layout has comparatively lowerpropagation delay than a strip line layout for the fixed dielectricconstant ∈_(r).

A signal experiences more propagation delay in a transmission line laidon a dielectric medium having a high dielectric constant compared to adielectric medium having a low dielectric constant. This causes signalskews for different length signal lines. Therefore, a lower-dielectricconstant medium is preferred in constructing on-chip and off-chiphigh-speed signal interconnections. A dielectric medium having a lowdielectric constant and a low dielectric loss tangent offer thefollowing advantages:

(1) A reduction in cross-talk allows higher on-chip and off-chipinterconnection density,

(2) a reduction in interconnection capacitance allows signal propagationover longer distances,

(3) a lower propagation delay, and

(4) a reduction in microwave loss due to confinement of the electricfield near the signal line, which helps signal propagation over longerdistances. Therefore, it is advantageous to transmit high speed signalsin a medium having a low dielectric constant as compared to a mediumhaving a high dielectric constant with substantially the same dielectricloss tangent.

Besides the dielectric constant of the medium, the type of signal line,the microwave loss, and the material used for conductor electrodestructure also limits the bandwidth of an interconnection.Microwave-loss occurs due to the electrode structure material, mainly asa result of the skin-depth of the signal. As skin-depth of copper at 100GHz is about 0.2 μm, therefore loss due to the skin-depth in a copperconductor electrode may be neglected. In that case, the bandwidth of theinterconnection (on-chip and off-chip) is mainly dependent on thefollowing factors:

(1) length of the interconnection;

(2) microwave-loss, originating from, (a) dielectric constant, (b)dielectric loss tangent, and (c) electrode structure material. As thelength of the interconnection in on-chip and off-chip applicationsvaries from a few micrometers to about 10 to 30 cm, the dependence oninterconnection length can be neglected. Therefore, the interconnectionbandwidth is mainly dependent on the dielectric constant and thedielectric loss tangent.

Those skilled in the art will appreciate that it is preferable to use amaterial having a low dielectric constant as well as a lower dielectricloss tangent. Therefore, it is necessary to develop new materials, andnew manufacturing technology for constructing on-chip and off-chipinterconnections.

Currently, a lot of work is focused on developing new materials foron-chip and off-chip interconnection technology. For example, foron-chip interconnection, it is possible to find low-K materials having adielectric constant between 3.0 and 4.5, which is lower than thedielectric constant of non-doped silicon oxide. However, beyond that, itwill be necessary to find other materials. In addition, incorporatingnew materials in the chip fabrication process is expensive in short termuntil the technology matures. At present, developing low-K materials foron-chip interconnection is expensive and time consuming. On the otherhand, for off-chip interconnection, and especially for chip-to-chipinterconnection, efforts are focused on shortening the length of theinterconnection and/or the interconnection layout. In both cases, ICmanufacturing costs would increase in implementing new technology.

With growing demand on higher signal speeds and larger bandwidthinterconnections, the conventional technology currently being used foron-chip and off-chip interconnection cannot be continued withoutincurring higher cost. It is desirable and even cost effective to adoptnew materials having a lower dielectric constant and lower dielectricloss tangent and manufacturing methods that are compatible with currentIC and PCB manufacturing technology.

SUMMARY OF THE INVENTION

Accordingly, it is an object of the invention to provide a technique forincreasing the bandwidth of on-chip and off-chip interconnections byreducing the effective dielectric constant and effective dielectric losstangent of dielectric materials used in interconnection system toincrease the bandwidth of the interconnection.

It is also an object of the invention to provide a technique to localizethe electrical field in the signal line and to prevent the electricalfield from distributing away from the electrical conductor.

It is also an object of this invention to provide the interconnectionstructure having low microwave-loss.

Another object of the present invention is to provide an on-chipinterconnection which is compatible with IC fabrication technology.

Another object of the present invention is to provide an off-chipinterconnection which is compatible with available PCB technology.

Another object of this invention is to provide a structure for making ahigh bandwidth connector and cable by using existing interconnectionmaterials.

Another object of this invention is to provide a method for fabricatinghigh speed on-chip interconnections using standard fabricationprocesses.

Another object of this invention is to provide a method for fabricatinghigh speed off-chip interconnections on a PCB board using standard PCBmanufacturing technology.

According to the invention, an interconnection system comprises:

(ii) a dielectric system designed to handle a desired signal frequency,comprising a dielectric medium having periodic arrays of dielectricspheres or cylinders with certain predetermined diameter and pitch,located outside the electrical “signal” lines;

(ii) a dielectric system designed to handle a desired signal frequency,comprising a dielectric medium having periodic arrays of dielectricspheres or cylinders with certain predetermined diameter and pitch,located outside the electrical signal lines;

(iii) a ground and/or a power line on the opposite side of thedielectric system;

wherein the shape of the periodic dielectric structure is a square, ahexagon, or any shape convenient for manufacturing.

According to the invention, an interconnection system comprises:

(i) single or multiple electrical conductors (signal lines hereinafter)for carrying one or more electrical signals from one electronic elementto another for electrical communication;

(ii) a dielectric system designed to handle a desired signal frequency,comprising a dielectric medium having periodic arrays of dielectricspheres or cylinders with certain predetermined diameter and pitch,located outside and underneath the electrical signal lines;

(iii) a ground and/or a power line located on the opposite side of thedielectric system;

wherein the shape of the periodic dielectric structure is a square, ahexagon, or any shape convenient for manufacturing.

According to the invention, an interconnection system comprises:

(i) single or multiple electrical conductors (“signal” lineshereinafter) for carrying one or more electrical signals from oneelectronic element to another for electrical communication;

(ii) a dielectric system designed to handle a desired signal frequency,comprising a dielectric medium having periodic arrays of dielectricspheres or cylinders with certain predetermined diameter and pitch,located outside the electrical signal lines;

(iii) a ground and/or a power line located on the opposite side of thedielectric system;

(iv) a second dielectric system to cover the electrical signal lines;

wherein the shape of the periodic dielectric structure is a square, ahexagon, or any shape convenient for manufacturing.

According to this invention, the dielectric system comprises periodicarrays of air holes with certain predetermined diameter and pitch formedin a dielectric medium, and located outside of the electrical conductors

According to this invention, the dielectric system comprises periodicarrays of air holes with certain predetermined diameter and pitch formedin a dielectric medium, located outside of the electrical conductors,and the holes are filled with liquid crystal, wherein the dielectricconstant inside the holes change in response to an electrical field,resulting in a tunable effective dielectric constant.

According to the invention, the dielectric system is based on a photoniccrystal system, an electronic crystal system, a quasi-photonic crystalsystem, or a quasi-electronic crystal system, comprising periodic arraysof the dielectric sphere or cylinder with predetermined diameter andlattice constant, wherein the electromagnetic wave is propagatedinhomogeneously, but is not dissipated in the dielectric media.

According to this invention, the dielectric system is designed on theprinciple of a photonic or an electronic band-gap.

According to this invention, the electrical signal line is a microstripline, a strip-line, or a coplanar waveguide type transmission line.

According to this invention, the interconnection bandwidth is increaseddue to reduced microwave-loss and signal propagation constant by using adielectric system having low effective dielectric constant and loweffective dielectric loss tangent. Reduction in the microwave-lossresults in achieving a speed of electromagnetic waves within theelectrical signal line to be closer to the speed of light.

One aspect of the invention teaches a cost effective method that iscompatible with current IC and PCB manufacturing technologies forconstructing high bandwidth on-chip and off-chip interconnections, forconnecting one electronic element to another electronic element using ahigh bandwidth electrical signal line, without sacrificing theirindividual signal speed.

Another advantage of this invention is that conventional IC fabricationtechnology for on-chip interconnection, conventional PCB technology foroff-chip interconnection, and conventional manufacturing technologiesare available for connector and cable manufacturing.

Another object of this invention is to minimize the skew in the signalinterconnection due to the signal propagation delay, by reducing themicrowave loss.

Other objects, features, and advantages of the present invention will beapparent from the accompanying claims, to be read in view of drawingsand the detailed description that follows.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be explained in more detail in conjunction with theappended drawings, wherein

FIG. 1 is a cross-sectional view showing a prior art intra-chip(on-chip) electrical interconnection. For simplicity, MOS-transistorsand their electrical interconnections are shown;

FIGS. 2A, 2B, and 2C are top and, front and side cross-sectional views,respectively, of a prior art inter-chip (off-chip) electricalinterconnection;

FIGS. 3A and 3B are top and cross-sectional views, respectively, showinga BGA-chip package for a high-speed die package. This is an explanatorydiagram showing the chip package shown in FIGS. 2A, 2B, and 2C;

FIGS. 4A and 4B are top and cross-sectional views, respectively, showinga CSP-chip package for a high-speed die package. This is an explanatorydiagram showing the chip package shown in FIGS. 2A, 2B and 2C;

FIGS. 5A and 5B are simplified cross-sectional views of microstrip lineand strip-line types of transmission lines, respectively. This is anexplanatory diagram showing a prior-art interconnection;

FIGS. 6A and 6B are top and cross-sectional views, respectively, showingthe electrical field distribution in a microstrip line type transmissionline. This is an explanatory diagram showing the prior-artinterconnection;

FIGS. 7A and 7B are frequency responses (S11 and S21) of microstrip lineand strip-line types of transmission lines, respectively. This is anexplanatory diagram showing the prior-art interconnection;

FIG. 8A is a top view, and FIGS. 8B and 8C are cross-sectional viewsalong the line AA′ shown in FIG. 8A, illustrating a microstrip line typetransmission line on a dielectric system for electronic interconnectionin a first preferred embodiment of the invention;

FIG. 9 is a frequency response (S21) comparing a microstrip line typetransmission line on a uniform layer of dielectric medium, and amicrostrip line type transmission line on a dielectric system having aperiodic dielectric structure

FIG. 10A is a top view, and FIGS. 10B, 10C, and 10D are cross-sectionalviews along the line AA′ shown in FIG. 10A, illustrating a microstripline type transmission line on a dielectric system having backside slotsand a periodic dielectric structure, in a second preferred embodiment ofthe invention;

FIGS. 11A and 11B are cross-sectional views illustrating microstrip linetype transmission line on a dielectric system consisting of an array ofair spheres or cylinders having a diameter D and a span b, based on aphotonic crystal system or an electronic crystal system in a thirdpreferred embodiment of the invention. The insets show examples of thecircular cell shape arranged in a triangular lattice (FIG. 11A) and asquare lattice (FIG. 11B);

FIG. 12 shows the cross-sectional view of a 2D (2-dimensional) photoniccrystal with circular air holes in a dielectric substrate and a linedefect for a signal line in a fourth embodiment of the invention;

FIGS. 13A, 13B, 13C, and 13D are cross-sectional views illustrating amicrostrip line type transmission line on different combinations ofmultiple dielectric system shown in FIGS. 8A-8C, 11A-11B, and 12, in afifth preferred embodiment of the invention. The hole can be filled withair or any other dielectric material;

FIGS. 14A and 14B are cross-sectional views illustrating an on-chip(intra-chip) interconnection wherein a signal line is laid on a periodicdielectric structure, in a sixth preferred embodiment of the invention.FIG. 14B is depicted along the line AA′ shown in FIG. 14A;

FIGS. 15A and 15B are cross-sectional views illustrating an on-chip(intra-chip) interconnection wherein a signal line is located on aperiodic dielectric structure, in a seventh preferred embodiment of theinvention. FIG. 15B is depicted along the line AA′ shown in FIG. 15A.The difference in FIGS. 14A & 14B is that the periodic dielectricstructure is extended under the signal line;

FIGS. 16A, 16B, and 16C show enlarged cross-sectional views of apreferred on-chip interconnection fabrication process according to theprinciples of the invention;

FIG. 17 is a schematic illustrating a preferred fabrication process of aPCB having a periodic dielectric structure in an eighth preferredembodiment according to the principles of the invention;

FIGS. 18A, 18B, and 18C show enlarged cross-sectional views of a 2-layerstacked PCB, illustrating inter-chip interconnections on a periodicdielectric structure in a ninth preferred embodiment of the invention;

FIG. 19A is a top view and FIGS. 19B and 19C are side and frontcross-sectional views, respectively, along the lines AA′ and BB′ shownin FIG. 19A, illustrating inter-chip (off-chip) interconnectionsconsisting of the multilayered PCB in a tenth preferred embodiment ofthe invention;

FIG. 20A is a top-view and FIGS. 20B and 20C are side and frontcross-sectional views, respectively, along the lines AA′ and BB′ shownin FIG. 20A, illustrating mountable/stackable inter-chip (off-chip)interconnections consisting of the multilayered PCB in an eleventhpreferred embodiment of the invention.

DETAILED DESCRIPTION OF THE INVENTION

The best modes for practicing the present invention will be described inturn with reference to the accompanying drawings. In the followingdescription, the same reference numerals denote components havingsubstantially the same functions and arrangements, and duplicateexplanations will be made only where necessary.

An important aspect of a high speed electronic interconnection accordingto a first embodiment is that the microwave loss is reduced by reducingthe effective dielectric constant, resulting in increased bandwidth ofthe interconnection, thereby reaching a signal speed in theinterconnection that approaches closer to the source signal speed.According to a second important aspect of the invention, the techniqueis cost effective and compatible with standard manufacturingtechnologies known in the art.

In an on-chip interconnection between two or more interconnectedelectronic elements (such as transistors, ICs, etc.), an electricalsignal at a low speed can be communicated through an electrical signalconductor in form of a wire laid on a dielectric medium. However, forcommunicating an electrical signal at a high-speed, an electrical signalconductor must be a microstrip line type, or a strip line typetransmission line.

In the following sections, preferred embodiments of the invention willbe disclosed, wherein first method(s) to reduce effective dielectricconstant will be discussed, and later the method(s) as applied topreferred embodiments will be presented.

FIGS. 8A, 8B, and 8C collectively represent a first embodiment of aninterconnection according to the principles of the invention, whereinFIG. 8A is a top view of the interconnection and FIGS. 8B and 8C arecross-sectional views of the interconnection along a line AA′ shown inFIG. 8A. More specifically, FIG. 8A shows a microstrip line type signalline 140A for carrying an electrical signal, laid on a dielectric systemhaving a periodic dielectric structure 148, consisting of an array 150of dielectric spheres or cylinders (also referred as a periodicdielectric array in the rest of the application) with a diameter 2 r(FIG. 8C) and a span a (FIG. 8A), and a second dielectric medium 152(FIGS. 8B, 8C). The combination of elements described above will becollectively referred as an interconnection system in this application.The values 2 r, a, and an operating frequency are carefully selected,such that the electrical field 154 is localized near the signal line,thereby preventing the electrical field 154 from spreading away from thesignal line. The periodic dielectric array effectively reduces thedielectric constant and localizes the electric field near the signalline. As a result the microwave loss is substantially reduced. In otherwords, as compared to a conventional interconnection shown in the priorart example of FIG. 6, wherein a signal line is laid on to a uniformlayer of a dielectric medium, the signal transmission in theinterconnection according to the present invention shown in FIG. 8A isless dispersive, and thereby a higher bandwidth of the interconnectionsystem is achieved. Since the electric field is localized near thesignal line less cross talk is expected. As shown in FIGS. 8B and 8C,the dielectric medium underlying the signal line may be chosen to be auniform layer of a dielectric material 156 (FIG. 8B), or a periodicdielectric array 158 (FIG. 8C).

As a design choice, the periodic dielectric array as shown in FIGS. 8A,8B, and 8C, may be an array of air holes or any other material having alower dielectric constant than the surrounding dielectric media. In theexemplary embodiment, although a single signal line is shown, thepresent invention will be applicable equally well to other types ofsignal lines such as, a strip-line type transmission line, single andmulti electrodes, and a coplanar waveguide configuration.

In FIG. 9 frequency responses of the microstrip line type transmissionlines of the example shown in the prior art FIG. 6 and the exemplaryembodiment shown in FIG. 8, respectively, are compared. Due to areduction in the microwave loss, the frequency response of theinterconnection system according to the principles of the invention issubstantially improved as compared to the prior art mircrostrip linetype interconnection.

FIGS. 10A, 10B, 10C, and 10D collectively represent a second embodimentof the invention, wherein to avoid repeated explanation, like parts areindicated by like reference numerals as used in FIGS. 8A-8C. Morespecifically, FIG. 10A is a top view of an interconnection and FIGS.10B, 10C, and 10D are the enlarged cross-sectional views of aninterconnection system along the line AA′ shown in FIG. 10A. In FIGS.10A, 10B, 10C, and 10D, the microstrip line type of transmission lineconsisting of signal lines 140C, 140D, and 140E and back-side groundlines 144C, 144D, and 144E, laid on to a periodic dielectric structure168 consisting of dielectric spheres or cylinders 150, with diameter 2 r(FIG. 10D) and span a (FIG. 10A), similar to the periodic dielectricarray described earlier in reference with FIGS. 8A-C, and a backsideslot 164. According to principles of the invention, the effectivedielectric constant (i.e. microwave index) is substantially reduced, andthe electrical field intensity 170 (FIG. 10A) near the signal lines isincreased, and localized.

FIGS. 11A and 11B are the enlarged cross-sectional views of aninterconnection system, in a third preferred embodiment in accordance tothe present invention, wherein like parts are indicated by likereference numerals as used in FIGS. 8 and 10 so that a repeatedexplanation is omitted here. More specifically, FIGS. 11A and 11B, eachshow a microstrip line type transmission line consisting of a signalline 140F and a back-side ground line 144F laid on a periodic dielectricstructure 172A (for FIG. 11A) and 172B (for FIG. 11B), respectively,consisting of spheres or cylinders 174 with diameter D and span b,similar to the periodic dielectric array described earlier in referencewith FIGS. 8 and 10. Each cylinder constitutes a cell 174 (to bereferred as a circular cell hereinafter. Each circular cell 174 isarranged in a triangular array 176, or a square array 178, shown ininsets 180 and 182 of FIGS. 11A and 11B, respectively. The arrangementof the cells forms a lattice. According to the principles of theinvention, the circular cells 174 formed inside a dielectric materialhaving a higher dielectric constant, contains air which has a lowerdielectric constant. The electric field from the signal line passesthrough the air cell or air hole 174, thereby reducing the effectivedielectric constant and increasing the bandwidth of the interconnection.The parameters such as diameter D and span b are carefully selected,such that the electrical field distribution away from the signal line isoptimized to further increase the interconnection bandwidth. Thoseskilled in the art will appreciate that the circular cells 174 arrangedin triangular or square lattice structure shown in the preferredembodiment of FIGS. 11A and 11B, may be replaced by elliptic cellsarranged in triangular or square lattice structure without deviatingfrom the principles of the invention. Advantageously, the geometricalparameters of the elliptical cells (lengths of the major and minor axes)may be additionally selected to further control the proportion of theelectrical field passing through the air and through the dielectricmaterial surrounding the elliptical cells. In this case also, theeffective dielectric constant (∈_(eff)) of the interconnection system isreduced. This adds many features in the interconnection system suchas_variable phase velocity (which is function of ∈_(eff)) and variablebandwidth of the interconnection. Additionally, it helps in adjustingsignal skews within the single signal line of the interconnectionsystem.

According to the preferred embodiment, ideally, the electrical signalspeed inside the interconnection system can approach closer to the speedof light, provided other losses related to the signal line structure,such as signal line electrode parameters (resistance, capacitance) areneglected.

The periodic dielectric structure described in the preferred embodimentsmay also include a photonic crystal structure (2D and 3D) within theperiodic dielectric structure and a line defect for the signal linelayout. A band-gap is formed due to cylinders of a lower dielectricconstant material formed inside a substrate having a relatively higherdielectric constant. FIG. 12 is the cross-sectional view of a periodicdielectric structure comprising 2D photonic crystals for a high-speedinterconnection system in a fourth preferred embodiment according to thepresent invention. The periodic dielectric structure comprises aphotonic crystal 184, consisting of air spheres or cylinders 186 withdiameter D′, height h, and span b′, in a dielectric substrate, and aline defect 188 on which a signal line is laid. In this structure, theelectrical field created from the high-speed signal flows through thesignal line (not shown) is confined and controlled in the signal-linedirection denoted by arrows, by the 2D photonic band gap effect. Theelectrical field may be completely localized in the air holes along thedirection of the signal flow, resulting in a low effective dielectricconstant (low microwave loss), thereby increasing the bandwidth of theinterconnection system. By changing the shape of the cylinder, forexample to an ellipse, and its size and span, the electrical field maybe localized in a region having a relatively higher effective dielectricconstant (and higher microwave loss) and the bandwidth of theinterconnection reduces. This allows the interconnection systems, tohave different bandwidths and the signals therein, to be of a low-speedor a high-speed when required. According to the preferred embodiment,the interconnection can ideally be designed to have a bandwidthsubstantially close to the bandwidth of an optical fiber so that it cancarry the high-speed electronics signal (even at terahertz frequency).In the example, the periodic dielectric structure is shown to becomprising a 2D photonic crystal. The present invention also includesthe 3D photonic crystal for high-speed interconnection systems,applicable in the on-chip and off-chip interconnections. This alsoincludes the means, such as the connector and cable, used for high-speedconnection of electronic elements including transistors.

The interconnection systems described in the preferred embodiments, canbe fabricated as follows: first, a layer of cylindrical holes is made ina dielectric substrate using one of many methods known in the art. Suchmethods may for example include IC fabrication technology for on-chipinterconnections and PCB technology for off-chip interconnections. Thisis followed by the formation of a signal line. The holes can be madeunderneath the signal line or the area underneath the signal line may bemasked while opening the holes outside the signal line. Alternatively, amaterial with a lower dielectric constant can fill up the holes ratherthan the dielectric substrate material.

FIGS. 13A, 13B, 13C, and 13D are the cross-sectional views of portionsof an interconnection system, in a fifth preferred embodiment inaccordance with the present invention, wherein like parts are indicatedby like reference numerals as used in FIGS. 11 and 12, so that repeatedexplanation is omitted here. The interconnection system comprising amicrostrip line type signal line 140F and a ground line 144F as a partof the interconnection is shown therein. In FIGS. 13A and 13B, aperiodic dielectric structure comprises single layers of periodicstructure 190 and 192, as described in FIG. 11. The difference betweenFIGS. 13A and 13B is that the air holes under the electrical signal lineare absent in FIG. 13A, and the air holes are present in FIG. 13B. Theinset 194 of FIG. 13 shows an exemplary schematic of a periodicdielectric structure with circular cells arranged in atriangular-lattice structure As shown in FIGS. 13C and 13D, periodicdielectric structures 196 and 198 shown therein comprise two layers ofdielectrics materials: (a) one having a periodic dielectric structure,and (b) the other having a uniform dielectric constant located under theperiodic dielectric structure. The periodic dielectric structures,mentioned in FIGS. 13A, 13B, 13C, and 13D are substantially similar tothose explained in FIGS. 11 and 12, so that related explanation isomitted here.

Broadband interconnections may be designed by using one or moredielectric layer combinations of photonic crystals and homogeneousdielectric layers. For simplicity, we have shown two layers, however,the present invention also includes interconnection systems with morethan two layers having the periodic dielectric structure wherein havinga periodic dielectric structure in the inner most dielectric layercontributes to the broadband of the interconnection system the most. Inthe preferred embodiments, described above in conjunction with FIGS.8A-8C, 9, 10A-10D, 11A-11D, 12 and 13A-13D, single microstrip line typesignal lines in different configurations are shown to explain the objectof the invention. Those skilled in the art will appreciate that theseembodiments are only exemplary, and do not exclude other types oftransmission lines known in the art, such as single or multiple signallines in strip-line and coplanar waveguide configurations.Advantageously, signal lines in these cases could be single ordifferential lines.

In the preferred embodiments described earlier, such dielectricmaterials include a wide range of materials known to those skilled inthe art, and sold under different trade names. For example, ceramicmaterials such as Duroid™, FR4, AlN, Al₂O₃, Mullite (3Al₂O₃: 2SiO₂),SiO₂, Silicon nitride, silicon carbide, Silicon-Oxy-Nitride, BeO,Cordierite (magnesium alumina silicate), BN, glass (with differentcompositions), epoxy glass, CaO, MnO, ZrO2, PbO, alkali-halide (e.g.NaBr, NaCl) BN, BeO, etc., and different types of polyimides andbenzocyclobutenes (BCBs) having desirable dielectric properties areequally applicable. Other polymeric dielectric materials also include,but are not limited to, TEFLON™, liquid crystal polymer, epoxy,parylene, silicone-polyimide, silicone-gel, fluorinated ethylenepropylene copolymer. It also includes elastomers (e.g. siliconeelastomer), monomers, and gels. Dielectric materials, which can be madeusing high temperature ceramics processing or IC fabrication processing,also are included in this category. All standard polymers can beavailable from the standard manufacturers for example, DuPont™,Hitachi-Chemical™, Mitsui™, and Mitsubishi-Chemical Industries™. Theliquid crystal polymer is marketed by Gore-Tex™ of Japan.

In reference with the preferred embodiments shown in FIGS. 8A-8C,10A-10D, 11A-11D, 12 and 13A-13D, the periodic dielectric structurescomprising air holes or arrays of spheres or cylinders in the dielectricsubstrate are described. The spheres in these examples may be made fromany dielectric material having a lower dielectric constant than thedielectric substrate. Alternatively, the air holes may be filled with amaterial having a lower dielectric constant than the dielectric constantof the substrate material. Alternatively, in the preferred embodiment,the air holes can be filled fully or coated with liquid crystal. In thiscase the electrical field changes the orientation of the liquid crystalsand controls the effective dielectric constant of the periodicdielectric structures. In the preferred embodiments as explained inFIGS. 10A, 10B, 10C, and 10D, a dielectric material having a dielectricconstant lower than the dielectric substrate or a liquid crystal polymermaterial may be filled in the backside slotted portion to effectivelyprovide tunability to the effective dielectric constant of the periodicdielectric structures.

According to the present invention, preferred embodiments describedearlier may be implemented in applications, including but not limited to(a) on-chip interconnections, for example, for connecting two or moreelectronic devices and/or connecting electrical and optical devices, (b)off-chip interconnections, for example, connecting two or moreelectronics chips on a circuit board, (c) high-speed chip (die)packaging, (d) high-speed electrical cable for connecting multipleelectrical modules for example, board-to-board interconnection,rack-to-rack interconnection, etc., and (e) high-speed connectors, usedas interface means to connect high-speed electronics elements.

Some of the different applications of the exemplary interconnectionsystem and their fabrication method(s) are described in the followingsections. These examples are only representative and are not limited tothe specific description provided.

On-Chip Interconnection:

FIG. 14A shows a cross-sectional view of a portion of an on-chipinterconnection system in a sixth preferred embodiment of the presentinvention, wherein like parts are indicated by like reference numerals,so that a repeated explanation is omitted here. FIG. 14B is across-sectional view along the line AA′ shown in FIG. 14A. In thisexample a MOS (metal-oxide semiconductor) device 224 (FIG. 14A)constructed on a semiconductor substrate 226 (e.g. silicon, FIG. 14A) isconnected with other electronic devices (not shown) by a signal line228A (FIG. 14A). A plurality of other electronic devices (not shown) onthe semiconductor substrate 226 (FIG. 14A) can be interconnected bysignal lines 228A (FIG. 14A) and 228B (FIG. 14B). The signal lines 228A(FIG. 14A) and 228B (FIG. 14B) are made on the periodic dielectricstructure 230 (FIG. 14A) comprising an array of air holes (spheres orcylinders) 232 (FIG. 14A), with predetermined diameter and span, into adielectric layer 234 (FIG. 14A). The portion of the dielectric layer236A (FIG. 14A) and 236B (FIG. 14B) over which the signal line 228A(FIG. 14A) and 228B (FIG. 14A) is laid is uniform (without the airholes). A layer (not shown) of the dielectric material used to constructthe periodic dielectric structure 230 (FIG. 14A) covers the top of theinterconnection.

In the exemplary periodic dielectric structure 230 shown in FIGS. 14Aand 14B, the dielectric layer 234 (FIG. 14A) is deposited using astandard IC fabrication process including, chemical vapor deposition(CVD), sputtering, or evaporation. After making patterns using anystandard photolithography technology, the holes 232 (FIG. 14A) areformed into the dielectric layer 234 (FIG. 14A) using a dry-etching (orwet-etching) technology, such as reactive ion beam etching (RIBE),reactive ion etching (RIE), milling, etc. Subsequent patterning andmetallization using a lift-off technique is used to make the signallines which connect the electronic devices on-chip.

FIG. 15A shows a cross-sectional view of a portion of the on-chipinterconnection system in a seventh preferred embodiment of the presentinvention, wherein like parts are indicated by like reference numeralsused in FIG. 14, so a repeated explanation is omitted here. FIG. 15B isa cross-section view along the line AA′ shown in FIG. 15A. In thisexemplary embodiment, a MOS (metal-oxide semiconductor)-device 224 (FIG.15A) on a semiconductor substrate 226 (e.g. silicon FIG. 15A) isconnected to another electronic device (not shown) by signal line 238A(FIG. 15A). A plurality of other electronic devices on semiconductorsubstrate 226 (FIG. 15A) can be interconnected by signal lines 238A(FIG. 15A) and 238B (FIG. 15B). The signal line 228A (FIG. 15 A) andalso 228B (FIG. 15B) is laid on the periodic dielectric structure 230(FIG. 15A) comprising an array of air hole (spheres or cylinder) 232with predetermined diameter and span in a dielectric layer 234 (FIG.15A). The difference between FIG. 14 and FIG. 15 is that the uniformlayers of dielectric material 236A (and 236B) in FIG. 14A (and FIG. 14B)under the signal lines (for example 228A and 228B in FIGS. 14A and 14B)is replaced by the periodic dielectric structure 238A and 238B in FIGS.15A and 15B (i.e. air hole array). A layer (not shown) of the dielectricmaterial used to construct the periodic dielectric structure 230 (FIG.15A) covers the top of the interconnection. The periodic dielectricstructure and signal lines are constructed following substantially thesame method as described earlier in reference with FIGS. 14A and 14B.

Cross-sectional views showing a portion of an on-chip interconnection inFIGS. 16A, 16B, and 16C outline a preferred fabrication processes inaccordance to the present invention, wherein like parts are indicated bylike reference numerals as used in FIGS. 14 and 15, so that repeatedexplanation is omitted here. For simplicity, a single layer and a singleline interconnection is shown. Substantially similar techniques may beused for fabricating large scale on-chip interconnection systems aswell. Following the oxide deposition and subsequent dry-etching stepsusing IC fabrication technologies such as RIE, RIBE, or ion-milling etc.air holes 232 (FIG. 16A) are opened into a dielectric layer 234 (FIG.16A), except in a portion 236C (FIG. 16A) over which a signal line 228C(FIG. 16C) will be laid in a later step. The air holes are filled with apolymer material 240 (FIG. 16B1. After having a pattern for opening 242(FIG. 16B) for the signal line, metallization for 228C (FIG. 16C) isformed using a lift-off technique. Thus, the dielectric portion 236C(FIGS. 16A-16C) over which signal line 228C (FIG. 16C) is laid on iskept without the air holes.

According to other preferred embodiments, on-chip interconnectionsystems may be constructed using one or more periodic dielectricstructures (for reducing the microwave loss), as explained earlier inreference with FIGS. 8A-8C, 9, 10A-10D, 11A-11B, 12, and 13A-13D. Forexample, air hole arrays can be used in the periodic dielectricstructure. Alternatively, the air holes may be filled with a lowdielectric constant material or a liquid crystal polymer. For examplesuch low dielectric constant materials include but are not limited to,vapor deposited silicon oxide, silicon nitride, silicon oxynitride,silicon carbide etc. Microporous silicon can also be used as dielectriclayer 234. Other dielectric materials may also include but are notlimited to, vapor deposited or spin-coated polymers such asbenzocyclobutene, acrylate based polymer, elastomer or monomer etc. Inthe preferred embodiments, described in reference with FIGS. 14A-B,15A-B and 16A-16C, microstrip line type transmission line is consideredfor the signal line, however, the principles outline in these examplesare applicable equally to other types of signal lines includingstrip-line, coplanar waveguide line, single or multiple signal lines (assingle or differential). The signal lines may be additionally covered ontop with a layer of (not shown) of the same or different dielectricmaterial as the ones used in the periodic dielectric structure.

Off-Chip Interconnections:

The principles of the on-chip interconnection system described earlierin reference with FIGS. 8A-8C, 9, 10A-10D, 11A-11B, 12, and 13A-13D, arealso applicable for multiple chip interconnections on a circuit board(off-chip). The circuit board may be made from FR4 material or any otherdielectric material as mentioned previously.

FIG. 17 shows a flow-chart of a printed circuit board (PCB) fabricationprocess for an off-chip interconnections system in an eighth embodimentin accordance with the principles of the invention, wherein like partsare indicated by like numerals, so that repeated explanation is omittedhere. A dielectric sheet (not shown) is made using a standard PCBtechnology, for example a slurry casting process in which the slurry iscast into about 200 μm to 500 μm thick ceramic sheets by a slip castprocess. To make the preorder dielectric structure 244, arrays of airholes are made into the dielectric substrate using processes such aslaser drilling, dry-etching, or wet-etching (following patterning foretching). Via holes are formed through the dielectric sheet with airholes 244 by a punching machine with punches and dies. For example,ceramic sheet 244 may have more than 10,000 via holes in a 250 mm squarearea. A low resistivity conductor paste is applied onto the punch sheet.In this step, via holes are filled with the paste to form the contactsbetween signal lines to be formed later. As the dielectric system haveair holes, additional processes may be necessary to fill the air holesand via holes which are then followed by wet etching to take the excessfiller out. The low resistivity conductor material may be the oneselected from a group consisting of silver-palladium, gold, molybdenum,and tungsten refractory material. The sheets are then sintered at hightemperature, which results in low electrical resistivity. Metallizationsheet 248 is made using a conventional PCB technology.

Two or more of such metallized sheets 248 are precisely stacked in apressing die in sequence by a stacking machine. These sheets 250 arelaminated together by a hot press. Density heterogeneities in thelaminated samples influence any shrinkage in the sintered substrate.Therefore, this lamination process is homogenously carried out by meansof a correct dimensional die and punch with flat surfaces. Burn out andsintering processes for the multilayered PCB board 252 may be necessaryafter lamination at the temperature suitable to ceramic material used asthe sheet.

FIGS. 18A, 18B, and 18C are the cross-sectional views of two layers ofceramic sheets having the periodic dielectric structure describedearlier in reference with FIGS. 8A-8C, 9, 10A-10D, 11A-11B, 12, and13A-13D, in a ninth embodiment, wherein the like parts are indicated bythe like numerals so that repeated explanations are omitted here. Themetallization, stacking, and lamination are carried out using the stepsdescribed in reference with FIG. 17.

FIG. 19A is a top view and FIGS. 19B and 19C are cross-sectional viewsalong the lines AA′ and BB′, respectively, shown in FIG. 19A in a tenthpreferred embodiment, wherein like parts are indicated by like numerals,so that similar explanations are omitted here. As an example, aninterconnection between two chips, a CPU processor 120 and a memorydevice 130, is shown. For simplicity, only enlarged portions of thecross-sectional views of high speed chips (e.g. the processor and thememory) interconnection is shown. Complete PCB with lower speed chipsinterconnection is not shown. Shown in this example is a high speedsignal line 254 connected on the top layer of the PCB whereas a lowspeed signal line (not shown) may be connected at the lower layer of thePCB. This arrangement will reduce any possibility of discontinuities,which may arise at the via holes. A high interconnection bandwidth isachieved using the technique described previously thereby individualsignal speed of the chips 120 and 130 are preserved. In the preferredembodiment shown in FIGS. 19A, 19B, and 19C, as a design choice, eitherthe whole portion of the PCB comprises the periodic dielectric structureor only the portion where the high speed chips are connected, has theperiodic dielectric structure, whereas the areas of the PCB where lowspeed chips are connected has a material having a uniform dielectricconstant.

FIG. 20A is a top view and FIGS. 20B and 20C are enlargedcross-sectional views along the lines AA′ and BB′ shown in FIG. 20A,respectively, in an eleventh preferred embodiment of the invention,wherein like parts are indicated by like numerals so that similarexplanations are omitted here. In this example, interconnection betweentwo chips is shown wherein high-speed chips are interconnected on aseparate board 256 comprising a periodic dielectric structure. In thisexemplary embodiment, a circuit board with the periodic dielectricstructure fabricated according to the process described earlier inreference with FIG. 17, is used to connect a processor and a memorydevice. Each board has pins 258 (FIG. 20C) connected on the outside ofthe PCB board 256 which is mounted on a second conventional PCB boardfor ground/power lines and other low speed connections.

The off-chip interconnection system described earlier may advantageouslycombine one or more periodic dielectric structures described in FIGS.8A-8C, 9, 10A-10D, 11A-11B, 12, and 13A-13D for reducing the microwaveloss. For example, air hole arrays in the periodic dielectric structuresmay be used without, or with a low dielectric constant material or aliquid crystal polymer.

The low dielectric constant materials may include ceramic materials suchas Duroid, FR4, AlN, Al₂O₃, Mullite (3Al₂O₃: 2SiO₂), SiC, SiO₂, Siliconnitride, Silicon-Oxy-Nitride, BeO, Cordierite (magnesium aluminasilicate), BN, Glass (with different compositions), epoxy glass, CaO,MnO, ZrO2, PbO, alkali-halide (e.g. NaBr, NaCl) etc.) etc. Othermaterials that are used to fill the air holes in a periodic dielectricstructures include polyimides and benzocyclobutenes (BCBs) havingdesired dielectric properties. Polymer dielectric materials alsoinclude, but are not limited to, TEFLON, liquid crystal polymer, epoxy,parylene, silicone-polyimide, silicone-gel, and fluorinated ethylenepropylene copolymer. It also includes materials of elastomers (e.g.silicone elastomer), monomers, and gels. All polymer materials listedhere are available from the manufacturers known to those skilled in theart, for example, Dupont, Hitachi-Chemical, Mitsui, Mitsubishi-ChemicalIndustries. Liquid crystal polymer is marketed by GoreTex, Japan.

In the preferred embodiments described earlier in reference with FIGS.17, 18A-18C, 19A-19C, 20A-20C, the signal lines shown therein aremicrostrip line type transmission lines. However, the principles of thepresent invention are applicable to other types of transmission linessuch as a strip line type transmission line, or a coplanar waveguideline having a single or multiple signal lines (as single ordifferential). A second layer (not shown) of a dielectric material usingeither same dielectric material as the one used in the periodicdielectric structure, or a different dielectric material, mayadditionally be used on top of the signal lines. The backside slot of anoff-chip high-speed interconnection on a PCB, may additionally have asingle layer, or multiple layers of one or more dielectric materialincluding a single or multilayered periodic dielectric structure, asshown in FIGS. 10A-D.

High Speed Connectors and Cables:

The principles of this invention described in reference with FIGS.8A-8C, 10A-10D, and 13A-13D are also applicable in designing andconstructing high speed connectors and cables forinterfacing/transmitting multigigahertz signals. Reducing the microwaveloss by implementing the periodic dielectric structure in the connectoror in the backside slots increases the bandwidth of the connectors andcables. The design may be further extended to single or differentialconnectors and cables.

High-Speed Chip Packaging:

According to techniques described in reference with FIGS. 8A-8C,10A-10D, and 13A-13D, high-speed chip packaging can be designed.Reducing the microwave loss by implementing the periodic dielectricstructure described previously increases the bandwidth of theinterconnection that connects the chip to its package. Single ordifferential pair lines can be designed using the periodic dielectricstructure having the lower dielectric loss and dielectric constant.According to the principles of the invention the high-speedinterconnection system may be designed, such that high-speed signalsflowing through the interconnection are made to flow some portion intothe high dielectric constant region and some portion flow through thelower dielectric constant region of the interconnection, for exampleinto air, resulting in a significantly higher interconnection bandwidth.

Several preferred embodiments for high-speed on-chip and off-chipinterconnection systems are described to merely illustrate theprinciples of the invention. More specifically, the interconnectionsystems described in the exemplary embodiments comprise a microstripline type transmission lines laid on a periodic dielectric structure.However, strip-line type and coplanar waveguide type transmission linesin single or multiple signal lines (including differential line)configuration are included within the scope of the invention. Theperiodic dielectric structure comprises arrays of spherical orcylindrical air holes, or cells in a dielectric material substrate. Theshape of each cell could be any type such as square, or any polynomialshape, and may optionally be filled with a second dielectric materialhaving lower dielectric constant than the dielectric substrate. Theeffective dielectric constant and dielectric loss tangent of periodicdielectric structure are lower as compared to a uniform dielectricmaterial. Therefore microwave loss of the interconnection system issubstantially reduced, resulting in higher bandwidth of theinterconnection system.

In some other preferred embodiments described in reference with FIGS.13A-13D, the periodic dielectric structure may be based on a 2-D or a3-D photonic or an crystal. Alternatively, the periodic dielectricstructure could be based on a fully photonic crystal (where fullphotonic band-gap effect may be used), or a quasi-photonic crystal.

In the preferred embodiments described, an electrical signal isconsidered in the signal line of the interconnection system. Theinterconnections system with certain modification can also be used forcontrolling and transmitting optical signals, electrical signals, or acombination of both.

The present invention has been described by way of its embodiments.However, those skilled in the art while practicing the invention mayaffect various changes and modifications that are within the scope ofthe present invention. Therefore, it must be understood that suchchanges and modifications are included without departing from the scopeand spirit of the invention.

The present invention will find application in high-speed on-chip andoff-chip interconnections, where signal speeds of 5 Gb/s and higher arenecessary. According to the principles of the invention usingconventional materials, the signal speed in the interconnections canideally be made substantially equal to the speed of light for no-losstransmission lines. The present invention can also be implemented in thehigh-speed, single or multiple signal connectors, and high-speed cables(not shown). Applications of the invention also include, on-chipinterconnections where high-speed electronic chips or electronic chipswith optical chips need to be connected. As the bandwidth of theinterconnection system can ideally be made close to the bandwidth ofoptical fiber, future monolithic (and also hybrid in the near future)integration of electronic and optical chips can also be realized withoutsignificantly sacrificing the signal speed within the chip. Theapplication of the invention may be extended to include high speedmultichip module interconnection, 3-D chip or memory interconnection,high speed parallel system for computer animation and graphics for highspeed 2-D or 3-D video transmission, high bandwidth image display, andhigh speed routers, where high speed electronic switches (or IC) need tobe interconnected. Other applications may include high speed (5 Gb/s andhigher speed) connectors and cables for high speed board-to-board,rack-to-rack interconnection, and single or multiple high-density signalconnections.

It will be understood by those skilled in the art that the foregoingpreferred embodiments in the specification are merely illustrativeexamples to describe the principles of this invention, and that variousmodifications can be made by those skilled in the art without departingfrom the scope and spirit of the invention. Although the invention hasbeen described with respect to specific embodiments for complete andclear disclosure, the appended claims are not to be thus limited but areto be construed as embodying all modifications and alternativeconstructions that may occurred to one skilled in the art which fairlyfall within the basic teaching set forth here.

1. The interconnection system comprising: at least one electrical signalline; at least one ground/power line; and a dielectric system interposedbetween said at least one ground/power line and said at least oneelectrical signal line, wherein the at least one electrical signal lineis laid on one surface of the dielectric system, said dielectric systemfurther comprising; at least one dielectric layer made from a firstdielectric material, said at least one dielectric layer furthercomprising; a first dielectric region having a continuous layer of thefirst dielectric material, wherein said signal line is located on top ofsaid first dielectric layer and said signal line does not border anyother side of said first dielectric region, located under the at leastone electrical signal line, and wherein said first dielectric indielectric system has further two dielectric regions adjacent to eachother, wherein the first dielectric region has the back slot or openedtrench facing to said ground/power line and aligned to the said signalline and second dielectric region has uniform dielectric facing thesignal line; and wherein said second dielectric region isolates thefirst said continuous dielectric region by surrounding said firstdielectric on its vertical sides, wherein said second dielectric regiondoes not border said signal line, said second dielectric region furtherincluding,  a first plurality of substantially cylindrical holes,vertically positioned, that run uninterrupted through the dielectricsystem starting at the surface of the dielectric and end at theground/power line, wherein said holes are formed in the at least onedielectric layer, and arranged in polygonal arrays, wherein each hole ofsaid first plurality of holes is filled with a second dielectricmaterial preferably having a lower dielectric constant than the firstdielectric material.
 2. The interconnection system according to claim 1wherein instead of cylindrical holes, dielectric spheres are present. 3.The interconnection system according to claim 1 further comprising: saiduniform dielectric region having further cylindrical or spherical holes;wherein the holes are periodically structured forming 2-dimensional and3-dimensional crystal; wherein the holes are created in the dielectricslab by making cylindrical or spherical air hole arrays having cell andlattice size and shape in the bulk of the dielectric materials; whereinthe resulting structure has a periodic variation of the permittivity. 4.The interconnection system according to claim 1 wherein the ground linesare laid on opposite sides of the trench.
 5. The interconnection systemaccording to claim 1 wherein the ground line is laid directly underneaththe signal line, wherein the said signal line and said ground line areseparated by a layer of periodic dielectric.
 6. The interconnectionsystem according to claim 1 wherein the ground line is laid directlyunderneath the signal line, wherein the said signal line and said groundline are separated by a layer of continuous dielectric.
 7. Theinterconnection system according to claim 1 where the interconnectionsystem is part of a multiplayer system consisting of systems with andwithout trenches.
 8. The interconnection system according to claim 1where the air holes are a variety of diameters and distances from eachother.
 9. A high speed electronics interconnects system comprising: atleast one electrical signal line; at least one ground/power line, and; adielectric system, between the said ground/power line and the saidelectrical signal line(s), comprising; at least one dielectric layercomprising with two dielectrics adjacent to each other; wherein firstdielectric aligned to said signal line, has two or more dielectricregions adjacent to each other and at least one of which said dielectricregion has uniform dielectric material; one surface of which touches thesignal line and at least one of which said dielectric regions has openedtrenches filled with air or low loss dielectric material and exposed toground plane; and the second dielectric has continuous and uniformdielectric material and located adjacent to both sides of said firstdielectric.
 10. The interconnection system according to claim 9 whereinthe interconnection system consists of a partially periodic dielectricstructure wherein the holes are filled with a lower loss dielectricmaterial.
 11. A high speed electronics interconnects system comprising:at least one electrical signal line; at least one ground/power line; anda dielectric system interposed between said at least one ground/powerline and said at least one electrical signal line, wherein the at leastone electrical signal line is laid on one surface of the dielectricsystem, said dielectric system further comprising; at least onedielectric layer made from a first dielectric material, said at leastone dielectric layer further comprising; a first dielectric regionhaving a continuous layer of the first dielectric material, wherein saidsignal line is located on top of said first dielectric layer and saidsignal line does not border any other side of said first dielectricregion, located under the at least one electrical signal line, andwherein said first dielectric in dielectric system has further twodielectric regions adjacent to each other; wherein the first dielectricregion has the back slot or opened trench facing to said ground/powerline and aligned to the said signal line and second dielectric regionhas uniform dielectric facing the signal line; and a second dielectricregion that isolates the first said continuous dielectric region bysurrounding said first dielectric on its vertical sides, wherein saidsecond dielectric region does not border said signal line, said seconddielectric region further including,  a first plurality of substantiallycylindrical holes, vertically positioned, that run uninterrupted throughthe dielectric system starting at the surface of the dielectric and endat the ground/power line, wherein said holes are formed in the at leastone dielectric layer, and arranged in polygonal arrays, wherein eachhole of said first plurality of holes is filled with a second dielectricmaterial preferably having a lower dielectric constant than the firstdielectric material. wherein the said ground/power lines are locatedunderneath the two dielectric regions that are adjacent to the saidtrench.
 12. The interconnection system according to claim 11 whereininstead of cylindrical holes, dielectric spheres are present.
 13. Theinterconnection system according to claim 11 where the interconnectionsystem is part of a multiplayer system consisting of systems with andwithout trenches.
 14. The interconnection system according to claim 11where the air holes are a variety of diameters and distances from eachother.
 15. The interconnection system according to claim 1, wherein theholes is coated with the liquid crystal material.